Ellipso Technology Co., Ltd. has supplied ellipsometers(including SE) and reflectometers with the options like Mapping, Micro spot and High Speed, so that characterizing a variety of films including ultra thin films and thick films can be made easy. Recently, the newly developed inspection apparatus applicable to photo-aligned PI surface on LCD glasses with its extremely high accuracy of 0.005 nm in retardation measurement, has been successfully installed into an in-line manufacturing system.